Study on Elastic Property of Thin Films by Resonant-Ultrasound Spectroscopy

Bayesian inference of elastic properties with resonant ultrasound spectroscopy.

Bayesian modeling and Hamiltonian Monte Carlo (HMC) are utilized to formulate a robust algorithm capable of simultaneously estimating anisotropic elastic properties and crystallographic orientation of a specimen from a list of measured resonance frequencies collected via Resonance Ultrasound Spectroscopy (RUS). Unlike typical optimization procedures which yield point estimates of the unknown pa...

Resonance Ultrasound Spectroscopy for Evaluating Elastic Constants and Incohesive Bonds of Thin Films

Free-vibration-resonance frequencies of a film/substrate layered specimen depend on the dimensions, densities, and elastic constants both of the film and substrate. Then, the elastic constants of thin films are inversely determined by measuring the resonance frequencies and the other parameters. Because contributions of the film elastic constants to the resonance frequencies are small, high acc...

Buckling modes of elastic thin films on elastic substrates

Two buckling modes have been observed in thin films: buckle delamination and wrinkling. This letter identifies the conditions for selecting the favored buckling modes for elastic films on elastic substrates. Transition from one buckling mode to another is predicted as the stiffness ratio between the substrate and the film or is predicted for variation of the stiffness ratio between the substrat...

Elastic properties of Zr-based bulk metallic glasses studied by resonant ultrasound spectroscopy

Profilometry of thin films on rough substrates by Raman spectroscopy

Thin, light-absorbing films attenuate the Raman signal of underlying substrates. In this article, we exploit this phenomenon to develop a contactless thickness profiling method for thin films deposited on rough substrates. We demonstrate this technique by probing profiles of thin amorphous silicon stripes deposited on rough crystalline silicon surfaces, which is a structure exploited in high-ef...